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The charge carriers in a conductive thin film experience scattering at surfaces and interfaces during transport. When the film thickness becomes comparable to the electron mean free path, the effects of these surfaces and interfaces become significant; this phenomenon is known as the size effect in thin films. It effectively reduces the carrier mean free path, resulting in lower electrical conductivity compared to bulk material of the same composition. Due to imperfect fabrication techniques, thin films typically exhibit relatively high defect concentrations, with the primary defects including impurities, vacancies, interstitial atoms, dislocations, grain boundaries, as well as surface and interface adsorption and segregation.

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Employee Spotlight 1


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